ion etching machine for quartz crystal in china

Posted at: December 4, 2012

DEEP REACTIVE ION ETCHING OF QUARTZ, LITHIUM … DEEP REACTIVE ION ETCHING OF QUARTZ, LITHIUM NIOBATE … active materials like…

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    Equipment: 4wave ion mill. … The etch rate varies depending on the material. Typical rates for common materials are; Silicon nitride ~33nm/min; Silicon dioxide ~33nm/min;

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